Title :
Investigation of thickness effects on AlN coated metal tips by in situ I-V measurement
Author :
Kang, D.H. ; Zhirnov, V.V. ; Wojak, G. ; Choi, W.B. ; Hren, J.J. ; Cuomo, J.J.
Author_Institution :
Dept. of Mater. Sci. & Eng., North Carolina State Univ., Raleigh, NC, USA
Abstract :
The thickness of a deposited coating can be a critical factor in determining the emission characteristics of coated emitters. Several researchers have reported a thickness dependence of emission from emitters coated with wide band gap materials. Thus systematic I-V experiments are required, preferably using a single emitter with deposited layers of varying thickness. In the present study, the thickness effects of ultra thin AlN layers on Mo emitters was investigated using an in situ I-V measurement technique.
Keywords :
aluminium compounds; electron field emission; molybdenum; vacuum microelectronics; AlN coating; AlN-Mo; Mo emitter; in situ I-V measurement; metal tip; thickness effect; wide band gap material; Argon; Cleaning; Coatings; Crystallography; Materials science and technology; Measurement techniques; Plasma measurements; Pollution measurement; Thickness measurement; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728777