Large-Scale Facilities for R&D on micro- and nanotechnologies: Neutrons and synchrotron X-rays for advanced electronics characterisation

Large-scale research infrastructures offer unrivalled performance for the advanced characterisation of micro- and nano-electronic devices and systems. However, the access to large-scale facilities permitting this unique advanced characterisation is well known to be challenging and is generally incompatible with industrial project management. The French “Investissements d´Avenir” programme is funding an important programme based in Grenoble, France on nanoelectronic technological research. The technology programme covers in particular 3D integration, silicon photonics and distributed network technologies, supported by technological infrastructure including a Characterisation Platform. This platform will aim to enhance the effectiveness of the Grenoble-based neutron and synchrotron light source facilities for European micro and nano-technological research.