Title :
IMPROVE simulation tool: Integrating heterogeneous simulation modules for semiconductor manufacturing processes
Author :
Almeida, Nuno ; Pires, João ; Sora, David
Author_Institution :
Critical Manuf., Maia, Portugal
Abstract :
IMPROVE is an R&D project sponsored by ENIAC, aiming to develop methods and tools to increase semiconductor production processes efficiency. Several simulation applications were developed within this project. Critical Manufacturing accepted the challenge of creating a tool able to connect and manage executions of these simulation applications.
Keywords :
digital simulation; production equipment; research and development; semiconductor device manufacture; ENIAC; IMPROVE simulation tool; R&D project; critical manufacturing; heterogeneous simulation modules; implementing manufacturing science solutions to increase equipment productivity and fab performance; semiconductor manufacturing process; semiconductor production process efficiency; Connectors; Robustness; Servers; Client/Server; GUI; IMPROVE; Semiconductors; Simulation;
Conference_Titel :
Semiconductor Conference Dresden-Grenoble (ISCDG), 2012 International
Conference_Location :
Grenoble
Print_ISBN :
978-1-4673-1717-7
DOI :
10.1109/ISCDG.2012.6360030