DocumentCode
2321295
Title
IMPROVE simulation tool: Integrating heterogeneous simulation modules for semiconductor manufacturing processes
Author
Almeida, Nuno ; Pires, João ; Sora, David
Author_Institution
Critical Manuf., Maia, Portugal
fYear
2012
fDate
24-26 Sept. 2012
Firstpage
165
Lastpage
167
Abstract
IMPROVE is an R&D project sponsored by ENIAC, aiming to develop methods and tools to increase semiconductor production processes efficiency. Several simulation applications were developed within this project. Critical Manufacturing accepted the challenge of creating a tool able to connect and manage executions of these simulation applications.
Keywords
digital simulation; production equipment; research and development; semiconductor device manufacture; ENIAC; IMPROVE simulation tool; R&D project; critical manufacturing; heterogeneous simulation modules; implementing manufacturing science solutions to increase equipment productivity and fab performance; semiconductor manufacturing process; semiconductor production process efficiency; Connectors; Robustness; Servers; Client/Server; GUI; IMPROVE; Semiconductors; Simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference Dresden-Grenoble (ISCDG), 2012 International
Conference_Location
Grenoble
Print_ISBN
978-1-4673-1717-7
Type
conf
DOI
10.1109/ISCDG.2012.6360030
Filename
6360030
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