A millimeter-wave integrated sensor for the dielectric constant characterization of pico-liter volumes of liquids

Author

Franc, Anne-Laure ; Ferrari, Philippe ; Rehder, Gustavo

Author_Institution

IMEP-LAHC, Univ. de Grenoble, Grenoble, France

fYear

2012

fDate

24-26 Sept. 2012

Firstpage

147

Lastpage

150

Abstract

A transmission line-based integrated sensor is investigated for the dielectric constant characterization of liquids using pico-liter volumes. The sensor is manufactured using the back-end-of-line of a CMOS 0.35 μm from AMS. A simple maskless etching post-CMOS process is used to realize a cavity underneath a transmission line to insert the liquid-under-test. Measurements with a vector network analyzer demonstrate a promising method for the characterization of the dielectric constant of liquids up to 40 GHz.

Keywords

CMOS integrated circuits; liquids; millimetre wave detectors; millimetre wave measurement; network analysers; permittivity measurement; transmission lines; volume measurement; AMS; dielectric constant characterization; liquid-under-test; liquids; millimeter-wave integrated sensor; pico-liter volume; simple maskless etching post-CMOS process; transmission line; transmission line-based integrated sensor; vector network analyzer; Aluminum; Fabrication; Hafnium; Liquids; Silicon; Temperature sensors; Vectors; Dielectric characterization; liquid; millimeter-wave; pico-liter; slow-wave transmission lines;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference Dresden-Grenoble (ISCDG), 2012 International

Conference_Location

Grenoble

Print_ISBN

978-1-4673-1717-7

Type

conf

DOI

10.1109/ISCDG.2012.6360034

Filename

6360034