Title :
Rf Sheath Parameters In Ar And He Rf Discharges
Author :
Godyak, V.A. ; Piejak, R.B.
Author_Institution :
GTE Laboratories Incorporated
Keywords :
Cyclotrons; Electrons; Helium; Magnetic fields; Monte Carlo methods; Numerical models; Plasma sources; Poisson equations; Predictive models; Radio frequency;
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
DOI :
10.1109/PLASMA.1991.695675
