DocumentCode

2321407

Title

Rf Sheath Parameters In Ar And He Rf Discharges

Author

Godyak, V.A. ; Piejak, R.B.

Author_Institution

GTE Laboratories Incorporated

fYear

1991

fDate

3-5 June 1991

Firstpage

171

Lastpage

171

Keywords

Cyclotrons; Electrons; Helium; Magnetic fields; Monte Carlo methods; Numerical models; Plasma sources; Poisson equations; Predictive models; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on

Conference_Location

Williamsburg, VA, USA

Print_ISBN

0-7803-0147-1

Type

conf

DOI

10.1109/PLASMA.1991.695675

Filename

695675