Title :
Real-time assessment of In surface segregation during the MBE growth of AlSb/InAs(Sb) heterostructures
Author :
Prevot, I. ; Marcadet, X. ; Renard, C. ; Massies, J.
Author_Institution :
Thales Res. & Technol., Orsay, France
Abstract :
It is now well established that In surface segregation prevents the formation of abrupt interfaces for In containing III-V heterostructures. Despite the drastic effects of In surface segregation on the actual potential profiles at quantum-well interfaces, only scarce results are available for the InAs/(Al,Ga)Sb material system. However, this material system has recently gained much technological interest, in particular because it is well suited for the achievement of room-temperature quantum-well laser diodes emitting in the 3-5 /spl mu/m mid-infrared spectral domain. The purpose of this communication is to show that In surface segregation can be evidenced in real-time during the growth of AlSb on InAs(Sb) by MBE using reflection high-energy electron diffraction (RHEED). The. interface width deduced from RHEED measurements (five monolayers (/spl plusmn/1 ML) for example at a standard growth temperature of 430/spl deg/C) agrees very well with the one observed by high-resolution transmission electron microscopy. Moreover, the influence of growth parameters on the In segregation length (/spl omega/) at the AlSb on InAs(Sb) interface and on the associated segregation ratio R = e/sup -1//spl omega// can easily be evaluated from RHEED measurements. The In segregation length (/spl omega/) is found to increase with the growth temperature (from /spl ap/5 to 15 ML in the 430-520/spl deg/C temperature range) as expected for a kinetically limited surface segregation phenomenon. The associated segregation ratio R varies from 0.8 to 0.9. These results indicate that the composition and therefore the band profile of InAs/AlSb heterostructures are strongly affected by indium surface segregation at AlSb on InAs interfaces.
Keywords :
III-V semiconductors; aluminium compounds; indium compounds; molecular beam epitaxial growth; quantum well lasers; semiconductor growth; surface segregation; 3 to 5 micron; 430 to 520 degC; AlSb-InAs(Sb); AlSb/InAs(Sb) heterostructures; In segregation length; In surface segregation; MBE growth; RHEED; growth parameters; potential profiles; quantum-well interfaces; room-temperature quantum-well laser diodes; Diffraction; Diodes; III-V semiconductor materials; Length measurement; Measurement standards; Optical materials; Optical reflection; Quantum well lasers; Temperature distribution; Transmission electron microscopy;
Conference_Titel :
Molecular Beam Epitaxy, 2002 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7581-5
DOI :
10.1109/MBE.2002.1037813