DocumentCode :
2323162
Title :
Dynamics of spontaneous roughening on the GaAs[001] surface
Author :
Thibado, P.M. ; LaBella, V.P. ; Bullock, D.W. ; Ding, Z.
Author_Institution :
Dept. of Phys., Arkansas Univ., Fayetteville, AR, USA
fYear :
2002
fDate :
15-20 Sept. 2002
Firstpage :
329
Lastpage :
330
Abstract :
Devices based on III-V compound semiconductors have fueled the growth of the multi-billion dollar telecommunications industry. Unlike silicon-based devices, which are produced primarily by ion implantation, III-V device structures must be produced by depositing one plane of atoms after another until the entire structure is grown. Necessarily, III-V device fabrication occurs solely at a surface. The better one can control and manipulate the motion of atoms on surfaces, the more sophisticated the device structures one can make. In order to better understand the surface processes important to device fabrication, we have combined, for the first time, three major advances in semiconductor growth and characterization: (1) state-of-the-art semiconductor growth via molecular beam epitaxy (Riber 32P), (2) optical transmission substrate temperature determination via the band gap (0-700/spl deg/C with /spl plusmn/2/spl deg/C accuracy, updated at 1 Hz), and (3) in situ, atomic-resolution surface characterization via scanning tunneling microscopy (Omicron). With these three technological breakthroughs, we have successfully conducted nanoscale experiments on the well-studied GaAs[001]-(2/spl times/4) surface.
Keywords :
III-V semiconductors; energy gap; gallium arsenide; island structure; molecular beam epitaxial growth; nanostructured materials; nanotechnology; reflection high energy electron diffraction; scanning tunnelling microscopy; semiconductor growth; surface topography; GaAs; GaAs[001] surface; III-V compound semiconductors; III-V device fabrication; III-V device structures; atomic-resolution surface characterization; band gap; molecular beam epitaxy; optical transmission substrate temperature determination; scanning tunneling microscopy; semiconductor growth; spontaneous roughening; surface processes; Atom optics; Atomic layer deposition; Communication industry; Fabrication; III-V semiconductor materials; Ion implantation; Optical microscopy; Rough surfaces; Semiconductor growth; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Molecular Beam Epitaxy, 2002 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7581-5
Type :
conf
DOI :
10.1109/MBE.2002.1037893
Filename :
1037893
Link To Document :
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