DocumentCode
2323162
Title
Dynamics of spontaneous roughening on the GaAs[001] surface
Author
Thibado, P.M. ; LaBella, V.P. ; Bullock, D.W. ; Ding, Z.
Author_Institution
Dept. of Phys., Arkansas Univ., Fayetteville, AR, USA
fYear
2002
fDate
15-20 Sept. 2002
Firstpage
329
Lastpage
330
Abstract
Devices based on III-V compound semiconductors have fueled the growth of the multi-billion dollar telecommunications industry. Unlike silicon-based devices, which are produced primarily by ion implantation, III-V device structures must be produced by depositing one plane of atoms after another until the entire structure is grown. Necessarily, III-V device fabrication occurs solely at a surface. The better one can control and manipulate the motion of atoms on surfaces, the more sophisticated the device structures one can make. In order to better understand the surface processes important to device fabrication, we have combined, for the first time, three major advances in semiconductor growth and characterization: (1) state-of-the-art semiconductor growth via molecular beam epitaxy (Riber 32P), (2) optical transmission substrate temperature determination via the band gap (0-700/spl deg/C with /spl plusmn/2/spl deg/C accuracy, updated at 1 Hz), and (3) in situ, atomic-resolution surface characterization via scanning tunneling microscopy (Omicron). With these three technological breakthroughs, we have successfully conducted nanoscale experiments on the well-studied GaAs[001]-(2/spl times/4) surface.
Keywords
III-V semiconductors; energy gap; gallium arsenide; island structure; molecular beam epitaxial growth; nanostructured materials; nanotechnology; reflection high energy electron diffraction; scanning tunnelling microscopy; semiconductor growth; surface topography; GaAs; GaAs[001] surface; III-V compound semiconductors; III-V device fabrication; III-V device structures; atomic-resolution surface characterization; band gap; molecular beam epitaxy; optical transmission substrate temperature determination; scanning tunneling microscopy; semiconductor growth; spontaneous roughening; surface processes; Atom optics; Atomic layer deposition; Communication industry; Fabrication; III-V semiconductor materials; Ion implantation; Optical microscopy; Rough surfaces; Semiconductor growth; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Molecular Beam Epitaxy, 2002 International Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-7803-7581-5
Type
conf
DOI
10.1109/MBE.2002.1037893
Filename
1037893
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