Nanoholes microscopy

This paper presents a new structure of an imaging sensor to be used in the implementation of real time Optofluidic Microsopy (OFM). This imaging sensor combines an integrated nanohole patterned in the first metal layer within each pixel and it can be fabricated in any standard submicron CMOS process. This implementation will enable a microscopic on-chip real time imaging of biological samples flowing in microfluidic channels. We verified the operation of this new implementation by many numerical optical simulations based on the finite element method that are used to model the real time OFM device.