Title :
New all 2-inch manufacturable high performance evanescent coupled waveguide photodiodes with etched mirrors for 40 Gb/s optical receivers
Author :
Achouche, M. ; Demiguel, S. ; Derouin, E. ; Carpentier, D. ; Barthe, F. ; Blache, F. ; Magnin, V. ; Harari, J. ; Decoster, D.
Author_Institution :
Alcatel R&I, Marcoussis, France
Abstract :
Evanescent PIN photodiodes are fabricated using all 2"-InP processing including on-wafer mirrors and coatings. 0.73 A/W responsivity at 1.55 μm, -1 dB vertical coupling tolerance of 2.2 μm and 47 GHz bandwidth are simultaneously demonstrated.
Keywords :
III-V semiconductors; antireflection coatings; etching; indium compounds; mirrors; optical fabrication; optical receivers; optical waveguides; p-i-n photodiodes; wafer bonding; 40 Gbits/s; 47 GHz; InP; InP processing; PIN photodiodes; coatings; etched mirrors; evanescent coupled waveguide photodiodes; fabrication; optical receivers; responsivity; vertical coupling tolerance; wafer mirrors; Etching; Length measurement; Manufacturing; Mirrors; Optical coupling; Optical fiber polarization; Optical receivers; Optical waveguides; Photodiodes; Shape measurement;
Conference_Titel :
Optical Fiber Communications Conference, 2003. OFC 2003
Print_ISBN :
1-55752-746-6
DOI :
10.1109/OFC.2003.1248117
