Experimental studies on a micromanipulator for micro/nano manipulation

This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. The micromanipulator is designed with both input and output decoupling properties, which allows the adoption of a SISO controller for the micromanipulation system. Based on the system identification, a digital lag-lead feedback controller is designed to compensate for the hysteresis and creep of the piezoelectric actuator. In view of the relative long control interval, a feedforward controller is then designed to implement a zero phase error tracking control (ZPETC). The positioning performances of the micromanipulator in terms of resolution, accuracy and repeatability, and tracking performances of 1-D and 2-D motion have been tested by several experimental studies. The experimental results show that the developed micromanipulator is sufficient for micro-positioning, whereas its tracking performances are expected to be further improved.