DocumentCode
2326092
Title
Simulation of an optical accelerometer based on integrated optical ring resonator
Author
Zhang, Tong ; Qu, Bei-Bei ; Xue, Xiao-jun ; Zhang, Jin-Ling ; Wu, Peng-Qin ; Zhang, Xiao-yang
Author_Institution
Key Lab. of Micro-Inertial Instrum. & Adv. Navig. Technol., Minist. of Educ., Southeast Univ., Nanjing, China
fYear
2010
fDate
10-12 April 2010
Firstpage
675
Lastpage
678
Abstract
Tight, integrated accelerometers are current interests in Micro-Opto-electro-Mechanical-Systems (MOEMS). An optical accelerometer based on a novel integrated optical resonator is proposed. The transmission spectra and the relation between the structure parameters and the device sensitivity are simulated. This ring resonator structure shows great potential to develop high sensitive accelerometers.
Keywords
accelerometers; integrated optics; micro-optomechanical devices; optical resonators; device sensitivity; integrated optical ring resonator; micro-opto-electro-mechanical systems; optical accelerometer; structural parameters; transmission spectra; Accelerometers; Couplers; Integrated optics; Optical devices; Optical feedback; Optical interferometry; Optical polymers; Optical resonators; Optical ring resonators; Optical sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Networking, Sensing and Control (ICNSC), 2010 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
978-1-4244-6450-0
Type
conf
DOI
10.1109/ICNSC.2010.5461579
Filename
5461579
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