Title :
A comprehensive millimeter-wave calibration development and verification approach
Author :
Okamura, W.M. ; DuFault, M.M. ; Sharma, A.K.
Author_Institution :
Electron. & Technol. Div., TRW Space & Electron Group, Redondo Beach, CA, USA
Abstract :
A comprehensive millimeter-wave calibration development and verification approach for on-wafer SOLT (Short-Open-Load-Through) standards is presented. Multiline TRL calibration procedures as well as EM simulations are used to develop initial SOLT calibration models which include the effects due to dispersion, metallization thickness, and distributed load. The models are then verified with offset open and load structures which cover all regions of the Smith chart in a frequency band. Theoretical and experimental verification of offset structures in K, Q, and V bands demonstrate good accuracy and repeatability of measurements.
Keywords :
calibration; dispersion (wave); measurement standards; millimetre wave circuits; millimetre wave measurement; EM simulations; K band; Q band; Smith chart; V band; dispersion; distributed load; metallization thickness; millimeter-wave calibration; multiline TRL calibration procedures; offset structures; on-wafer SOLT; short-open-load-through standards; verification approach; Calibration; Dispersion; Electromagnetic measurements; Frequency; Impedance; Load modeling; Measurement standards; Millimeter wave technology; Space technology; Standards development;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.862254
