Title :
Novel integrated MEMS horn antenna for terahertz applications
Author :
Yuan, Yong ; Liu, Yong ; Lv, Xin
Author_Institution :
Dept. of Electron. Eng., Beijing Inst. of Technol., Beijing, China
Abstract :
In this paper, a novel integrated horn antenna for terahertz applications is proposed in order to enhance the performance of planar antenna elements. The processing of this type horn antenna combines two different MEMS techniques, DRIE and wet etching. The structure of the horn includes two parts, pyramid horn back cavity and octagonal horn front cavity. There are many tunable parameters of the horn, so high performance terahertz antenna elements can be achieved by synthesizing these parameters.
Keywords :
horn antennas; micromechanical devices; planar antennas; terahertz waves; MEMS horn antenna; microelectromechanical system; octagonal horn front cavity; planar antenna element; pyramid horn back cavity; terahertz antenna element; terahertz application; wet etching; Dipole antennas; Horn antennas; Micromechanical devices; Planar arrays; Silicon; Sputtering; Submillimeter wave technology; Substrates; Wafer bonding; Wet etching;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on
Conference_Location :
Busan
Print_ISBN :
978-1-4244-5416-7
Electronic_ISBN :
978-1-4244-5417-4
DOI :
10.1109/ICIMW.2009.5325632
