Title :
Non-contact internal-MMIC measurement using scanning force probing
Author :
Falkingham, C.J. ; Edwards, I.H. ; Bridges, G.E.
Author_Institution :
Dept. of Electr. & Comput. Eng., Manitoba Univ., Winnipeg, Man., Canada
Abstract :
A non-contacting probe capable of internal vector measurements of MMICs is presented. Accurate internal amplitude and phase measurements can be made with micrometer spatial resolution, <1 fF loading and without the need to depassivate the circuit. A 10 GHz bandwidth probe is presented.
Keywords :
Atomic force microscopy; Failure analysis; Integrated circuit measurement; Integrated circuit reliability; MMIC; 10 GHz; internal amplitude measurements; internal phase measurements; internal vector measurements; micrometer spatial resolution; noncontact internal-MMIC measurement; scanning force probing; Bandwidth; Circuit testing; Force measurement; Frequency; Impedance; Monitoring; Performance evaluation; Phase measurement; Scanning probe microscopy; Spatial resolution;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.862287
