Title :
Contrast quantification of millimeter-wave scanning near-field microscope with a slit probe
Author :
Hamano, T. ; Watanabe, F. ; Nuimura, S. ; Nozokido, T. ; Bae, J. ; Mizuno, K.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
A millimeter-wave scanning near-field (MMW-SNF) microscope with a metal slit-type probe has advantages over a conventional MMW-SNF microscope with a point-type probe. In this paper, contrast of images obtained by the microscope with a slit-type probe has been evaluated in order to quantify the image contrast. The difference of 0.3 in measurement of relative dielectric constants of objects can be distinguished when the dielectric constants are less than 8.0.
Keywords :
Millimetre wave measurement; Permittivity measurement; Probes; Scanning probe microscopy; contrast quantification; image contrast; metal slit-type probe; millimeter-wave scanning near-field microscope; relative dielectric constants; Charge carrier density; Dielectric constant; Dielectric materials; Dielectric measurements; Microscopy; Millimeter wave communication; Millimeter wave measurements; Probes; Semiconductor materials; Silicon;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.862288
