• DocumentCode
    2326775
  • Title

    Contrast quantification of millimeter-wave scanning near-field microscope with a slit probe

  • Author

    Hamano, T. ; Watanabe, F. ; Nuimura, S. ; Nozokido, T. ; Bae, J. ; Mizuno, K.

  • Author_Institution
    Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
  • Volume
    3
  • fYear
    2000
  • fDate
    11-16 June 2000
  • Firstpage
    1623
  • Abstract
    A millimeter-wave scanning near-field (MMW-SNF) microscope with a metal slit-type probe has advantages over a conventional MMW-SNF microscope with a point-type probe. In this paper, contrast of images obtained by the microscope with a slit-type probe has been evaluated in order to quantify the image contrast. The difference of 0.3 in measurement of relative dielectric constants of objects can be distinguished when the dielectric constants are less than 8.0.
  • Keywords
    Millimetre wave measurement; Permittivity measurement; Probes; Scanning probe microscopy; contrast quantification; image contrast; metal slit-type probe; millimeter-wave scanning near-field microscope; relative dielectric constants; Charge carrier density; Dielectric constant; Dielectric materials; Dielectric measurements; Microscopy; Millimeter wave communication; Millimeter wave measurements; Probes; Semiconductor materials; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium Digest. 2000 IEEE MTT-S International
  • Conference_Location
    Boston, MA, USA
  • ISSN
    0149-645X
  • Print_ISBN
    0-7803-5687-X
  • Type

    conf

  • DOI
    10.1109/MWSYM.2000.862288
  • Filename
    862288
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2326775