Design, fabrication and performance evaluation of a piezoresistive arsenic sensor

Author

Islam, Md Shofiqul ; Das, Sourav ; Shandhi, Md Mobashir Hasan

Author_Institution

Dept. of Electr. & Electron. Eng., Bangladesh Univ. of Eng. & Technol., Dhaka, Bangladesh

fYear

2010

fDate

18-20 Dec. 2010

Firstpage

239

Lastpage

242

Abstract

In this paper the design, analysis and testing of a cantilever based piezoresistive arsenic sensor has been described. The fabrication on a single crystal silicon substrate utilizes the technologies of anisotropic chemical etching. The arsenic sensor, which is of resistive type, changes its resistance when the sensing cantilever adsorbs arsenic on its surface coated with arsenic adsorbent. Using the COMSOL software, a model of the structure was established and the stress distribution of the cantilever was analyzed. The results show that the sensor has a high linearity and high sensitivity of 0.76 mV/ppm at room temperature.

Keywords

arsenic; cantilevers; chemical sensors; elemental semiconductors; etching; microsensors; piezoresistive devices; silicon; As; COMSOL software; anisotropic chemical etching; cantilever based piezoresistive arsenic sensor testing; microsensor; sensor design; single crystal silicon substrate fabrication; Cantilever; FEM; arsenic sensor; microsensor; piezoresistivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Computer Engineering (ICECE), 2010 International Conference on

Conference_Location

Dhaka

Print_ISBN

978-1-4244-6277-3

Type

conf

DOI

10.1109/ICELCE.2010.5700672

Filename

5700672