Title :
Silicon substrate low-temperature-grown GaAs terahertz photomixers
Author :
Beck, Alexandre ; Blary, Karine ; Peytavit, Emilien ; Akalin, Tahsin ; Lampin, Jean-françois ; Yang, Chun ; Hindle, Francis ; Mouret, Gael
Author_Institution :
Inst. d´´Electron. de Microelectron. et de Nanotechnol., Univ. de Lille 1, Villeneuve-d´´Ascq, France
Abstract :
We have developed an epitaxial layer transfer technique for THz devices. Here we report the fabrication and the characterization of a THz photomixer on a silicon substrate. The active part of the photomixer is a low-temperature-grown GaAs mesa which has been transferred and layer bonded onto a Si substrate. The preliminary measurement of the THz signal generated in a photomixing configuration at 0.78 mum shows that the overall performance is comparable to standard GaAs substrate photomixers at frequencies up to 2 THz.
Keywords :
III-V semiconductors; epitaxial layers; gallium arsenide; molecular beam epitaxial growth; photodetectors; terahertz wave detectors; GaAs; Si; epitaxial layer transfer technique; frequency 2 THz; low temperature grown terahertz photomixers; terahertz device; Bonding; Chemicals; Etching; Fabrication; Frequency; Gallium arsenide; Lithography; Optical sensors; Silicon; Substrates;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on
Conference_Location :
Busan
Print_ISBN :
978-1-4244-5416-7
Electronic_ISBN :
978-1-4244-5417-4
DOI :
10.1109/ICIMW.2009.5325684