Application of super-fine ink-jet printer to fabrication of terahertz planer metamaterials

Author

Kawabata, T. ; Takano, K. ; Hsieh, C.-F. ; Akiyama, K. ; Miyamaru, F. ; Takeda, M.W. ; Abe, Y. ; Tokuda, Y. ; Pan, R.-P. ; Pan, C.L. ; Hangyo, M.

Author_Institution

Inst. of Laser Eng., Osaka Univ., Suita, Japan

fYear

2009

fDate

21-25 Sept. 2009

Firstpage

1

Lastpage

2

Abstract

A super-fine ink-jet (SIJ) printing technology has been applied to the fabrication of terahertz metamaterials. The SIJ printing process is very simple and flexible, although the accuracy of the metallic line is comparable to the photolithography process. We fabricate basic terahertz metamaterials printed on high resistivity Si substrates: metal wire-grid structures and split-ring resonator arrays. The terahertz responses of the printed samples agree with those expected from the structures. The SIJ printing has a potential to accelerate the developments of the terahertz metamaterial researches.

Keywords

electrical resistivity; ink jet printing; materials preparation; metamaterials; nanofabrication; nanoparticles; silver; terahertz wave spectra; Ag; Si; high resistivity silicon substrates; metal wire-grid structures; photolithography process; silver nanoparticle paste ink; split-ring resonator arrays; super-fine ink-jet printing technology; terahertz planer metamaterial fabrication; terahertz transmission spectra; Conductivity; Fabrication; Ink jet printing; Lithography; Metalworking machines; Metamaterials; Printers; Silver; Submillimeter wave technology; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on

Conference_Location

Busan

Print_ISBN

978-1-4244-5416-7

Electronic_ISBN

978-1-4244-5417-4

Type

conf

DOI

10.1109/ICIMW.2009.5325705

Filename

5325705