Thickness measurement of thin dielectric film using metallic mesh

Author

Kato, E. ; Yoshida, S. ; Suizu, K. ; Kawase, K.

Author_Institution

Nagoya Univ., Nagoya, Japan

fYear

2009

fDate

21-25 Sept. 2009

Firstpage

1

Lastpage

2

Abstract

Metallic mesh, a metallic thin film with regularly spaced openings, acts as a band-pass filter in the terahertz region. In a certain spectral range, its transmittance becomes higher than the open-area ratio and its resonant transmission spectrum is affected by the dielectric constant in and above the openings. Therefore, metallic mesh can be used as a sensitivity-enhancing material if samples are placed on the metal surface. Here, we report the measurement of thickness at a resolution of 1 mum for thin dielectric films and two-dimensional (2D) imaging using metallic mesh.

Keywords

band-pass filters; dielectric thin films; metallic thin films; permittivity; terahertz wave spectra; thickness measurement; band-pass filter; dielectric constant; metallic mesh; open-area ratio; resonant transmission spectrum; sensitivity-enhancing material; terahertz filter; thickness measurement; thin dielectric film; transmittance; two-dimensional imaging; Band pass filters; Dielectric constant; Dielectric films; Dielectric materials; Dielectric measurements; Dielectric thin films; Image resolution; Inorganic materials; Resonance; Thickness measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on

Conference_Location

Busan

Print_ISBN

978-1-4244-5416-7

Electronic_ISBN

978-1-4244-5417-4

Type

conf

DOI

10.1109/ICIMW.2009.5325728

Filename

5325728