Title :
Evaluation of the catalytic metal for the hydrogen sensor using terahertz chemical microscope
Author :
Sugimoto, Takeshi ; Kondo, Yosuke ; Kiwa, Toshihiko ; Kawayama, Iwao ; Tonouchi, Masayoshi ; Tsukada, Keiji
Author_Institution :
Grad. Sch., Natural Sci. & Technol., Okayama Univ., Okayama, Japan
Abstract :
To develop the hydrogen sensor, the chemical potential due to the catalytic reaction of the metals are required to evaluate. The platinum and titanium layered electrode on the insulator/semiconductor layered device are fabricated as the test chip. The catalytic reaction of platinum and hydrogen gas were successfully visualized.
Keywords :
catalysis; chemical potential; gas sensors; hydrogen; submillimetre wave devices; catalytic metal reaction; chemical potential; hydrogen gas; hydrogen sensor; insulator-semiconductor layered device; platinum layered electrode; terahertz chemical microscope; titanium layered electrode; Chemical sensors; Electrodes; Hydrogen; Insulation; Insulator testing; Microscopy; Platinum; Semiconductor device testing; Titanium; Visualization;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on
Conference_Location :
Busan
Print_ISBN :
978-1-4244-5416-7
Electronic_ISBN :
978-1-4244-5417-4
DOI :
10.1109/ICIMW.2009.5325729
