Title :
Ultra-compact multichannel optical components based on PLC technologies
Author :
Kanie, T. ; Katayama, M. ; Sano, T. ; Kohda, H. ; Sunaga, T. ; Shiozaki, M. ; Furukawa, M. ; Suganuma, H. ; Saitoh, K. ; Nishimura, M.
Author_Institution :
Sumitomo Electr. Ind. Ltd., Yokohama, Japan
Abstract :
We propose multichannel based on PLC and MEMS technologies. 12 channel optical switch arrays and VOA arrays have been successfully developed by integrating 2×2 cross type and MEMS micro-mirrors connected together by flip chip bonding.
Keywords :
micromirrors; optical attenuators; optical planar waveguides; optical switches; MEMS micro-mirrors; MEMS technology; PLC technology; VOA arrays; flip chip bonding; optical switch arrays; ultra-compact multichannel optical components; Electric shock; Feedback loop; Micromechanical devices; Motion control; Open loop systems; Optical devices; Programmable control; Resonant frequency; Vertical cavity surface emitting lasers; Vibrations;
Conference_Titel :
Optical Fiber Communications Conference, 2003. OFC 2003
Print_ISBN :
1-55752-746-6
DOI :
10.1109/OFC.2003.1248287
