DocumentCode
2327674
Title
Ultra-compact multichannel optical components based on PLC technologies
Author
Kanie, T. ; Katayama, M. ; Sano, T. ; Kohda, H. ; Sunaga, T. ; Shiozaki, M. ; Furukawa, M. ; Suganuma, H. ; Saitoh, K. ; Nishimura, M.
Author_Institution
Sumitomo Electr. Ind. Ltd., Yokohama, Japan
fYear
2003
fDate
23-28 March 2003
Firstpage
388
Abstract
We propose multichannel based on PLC and MEMS technologies. 12 channel optical switch arrays and VOA arrays have been successfully developed by integrating 2×2 cross type and MEMS micro-mirrors connected together by flip chip bonding.
Keywords
micromirrors; optical attenuators; optical planar waveguides; optical switches; MEMS micro-mirrors; MEMS technology; PLC technology; VOA arrays; flip chip bonding; optical switch arrays; ultra-compact multichannel optical components; Electric shock; Feedback loop; Micromechanical devices; Motion control; Open loop systems; Optical devices; Programmable control; Resonant frequency; Vertical cavity surface emitting lasers; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communications Conference, 2003. OFC 2003
Print_ISBN
1-55752-746-6
Type
conf
DOI
10.1109/OFC.2003.1248287
Filename
1248287
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