Title :
Environmental Awareness In Semiconductor Manufacturing
Author_Institution :
Environmental Policy Office, Hitachi, Ltd.
Abstract :
World current for sustainable development is requiring environmentally sound production processes and products. Semi-conductor industry is high tech one. However, it consumes larger amount of resources than other industries. It is hoped that the semi-conductor industries will consider this point and make efforts to improve it in the same competitive way as their products performances.
Keywords :
Conducting materials; Fabrication; Industrial waste; Investments; Production facilities; Raw materials; Research and development; Semiconductor device manufacture; Solvents; Waste reduction;
Conference_Titel :
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location :
Tokyo, Japan
DOI :
10.1109/ISSM.1994.729414
