Title :
Fundamentals Of Wafer Fab Automation The Forth Generation CIM FA
Author_Institution :
IBM Japan Ltd.
Abstract :
The large scale wafer requires more precise process control, feedback/feed forward for the productivity than ever. CIM FA (Computer Integrated Manufacturing Factory Automation) will be a fundamental solution to future semiconductor manufacturing. In this paper, I would like to discuss about what CIM FA should be for semiconductor manufacturing, and would introduce CIM FA plant where we are now operating 200mm manufacturing.
Keywords :
Automatic control; Computer aided manufacturing; Computer integrated manufacturing; Control systems; Etching; Feedback; Manufacturing automation; Process control; Robotics and automation; Semiconductor device manufacture;
Conference_Titel :
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location :
Tokyo, Japan
DOI :
10.1109/ISSM.1994.729415
