DocumentCode
2328962
Title
Fundamentals Of Wafer Fab Automation The Forth Generation CIM FA
Author
Koike, T.
Author_Institution
IBM Japan Ltd.
fYear
1994
fDate
21-22 June 1994
Firstpage
23
Lastpage
26
Abstract
The large scale wafer requires more precise process control, feedback/feed forward for the productivity than ever. CIM FA (Computer Integrated Manufacturing Factory Automation) will be a fundamental solution to future semiconductor manufacturing. In this paper, I would like to discuss about what CIM FA should be for semiconductor manufacturing, and would introduce CIM FA plant where we are now operating 200mm manufacturing.
Keywords
Automatic control; Computer aided manufacturing; Computer integrated manufacturing; Control systems; Etching; Feedback; Manufacturing automation; Process control; Robotics and automation; Semiconductor device manufacture;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location
Tokyo, Japan
Type
conf
DOI
10.1109/ISSM.1994.729415
Filename
729415
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