DocumentCode
2328989
Title
Merits And Demerits Of Automation
Author
Yoshida, H.
Author_Institution
Kitaitami Works, Mitsubisi Electric Corportion
fYear
1994
fDate
21-22 June 1994
Firstpage
27
Lastpage
30
Abstract
Automation has been introduced into IC manufacturing line, based on the progression of manufacturing technology, so that the totally automated line can have been already realized. This cultivated experience showed several merits to us, but also indicated some needless demerits. This paper will discuss merits and demerits of automation on our results, and consider the future automation.
Keywords
Automatic control; Computer aided instruction; Control systems; Magneto electrical resistivity imaging technique; Manufacturing automation; Process control; Production facilities; Production systems; Quality control; Vehicles;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location
Tokyo, Japan
Type
conf
DOI
10.1109/ISSM.1994.729416
Filename
729416
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