Results Of An Implant Masking Integrated Workcall In A Development Facility

Effects of equipment layout on wafer fab performance are discussed. The traditional wafer fab layout is known to industrial engineers as a job shop. The strength of the job shop system is excellent process flexibility. Job shop layouts also cause long cycle times, lesser quality, and poor communication between workers. A workcell based wafer fab addresses some of those weaknesses. This paper presents initial results of the implant masking workcell in a development fab.