A 134-pixel CMOS sensor for combined time-of-flight and Optical Triangulation 3-D imaging

Author

Sgrott, Oreste ; Mosconi, Daniel ; Saiani, Massimo ; Stoppa, David ; Pedretti, Gianmaria ; Perenzoni, Matteo ; Gonzo, Lorenzo

Author_Institution

Center for Mater. & Microsyst., Fondazione Bruno Kessler, Povo, Italy

fYear

2009

fDate

14-18 Sept. 2009

Firstpage

208

Lastpage

211

Abstract

This paper describes the design and characterization of a linear sensor suitable for distance measurements based on both Optical Triangulation (OT) and Indirect Time of Flight (1-TOF) techniques. A 134-pixel array has been fabricated in a standard 0.35-mum 2P4M 3.3V CMOS technology, and a complete characterization has been performed showing sub-mm precision in OT mode at 131 kvoxel/s in the short range, and a maximum of 8.5% error in I-TOF mode at 125 voxel/s for target distance up to 5 m.

Keywords

CMOS image sensors; stereo image processing; CMOS sensor; CMOS technology; distance measurements; indirect time-of-flight techniques; linear sensor; optical triangulation 3D imaging; size 0.35 mum; voltage 3.3 V; CMOS image sensors; CMOS technology; Cultural differences; Lenses; Optical design techniques; Optical imaging; Optical interferometry; Optical sensors; Semiconductor device measurement; Sensor phenomena and characterization;

fLanguage

English

Publisher

ieee

Conference_Titel

ESSCIRC, 2009. ESSCIRC '09. Proceedings of

Conference_Location

Athens

ISSN

1930-8833

Print_ISBN

978-1-4244-4354-3

Type

conf

DOI

10.1109/ESSCIRC.2009.5325938

Filename

5325938