• DocumentCode
    2329137
  • Title

    Agile Flow Control In Semiconductor Manufacturing: Simulation And Animation Demonstration

  • Author

    Ruey-Shan Guo ; Griffin, R. ; Slama, M.

  • Author_Institution
    National Semiconductor Corporation
  • fYear
    1994
  • fDate
    21-22 June 1994
  • Firstpage
    42
  • Lastpage
    45
  • Abstract
    Factory flow control seeks to optimize operational performance by reducing production cycle time, work-in-process, and increasing throughput. We will use an animation-based discrete event simulator to highlight the current operational problems and discuss the possible improvement through the choices of wafer release method, lot size and buffer size. A hypothetical implant operation which consists of seven process steps is used as an example. It will be shown that the optimized pull system has a 10 times improvement in both cycle time and work-in-process inventory without sacrificing throughput compared to the current "push and balanced" system.
  • Keywords
    Agile manufacturing; Animation; Communication system control; Discrete event simulation; Implants; Production facilities; Pulp manufacturing; Semiconductor device manufacture; Throughput; Virtual manufacturing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
  • Conference_Location
    Tokyo, Japan
  • Type

    conf

  • DOI
    10.1109/ISSM.1994.729420
  • Filename
    729420