Title :
A TPM-Inspired Factory Throughput Analysis Tool
Author_Institution :
SEMATECH
Abstract :
The throughput of a factory is constrained by its bottleneck tools. TPM is a methodology that can be used to improve the efficiencies and thus the throughputs of these bottleneck tools. CUBES is a model that helps identify where improvements can be made and how much benefit can be gained from each improvement. If all bottlenecks are analyzed together, factory level throughput improvements can be made.
Keywords :
Availability; Circuits; Costs; Electronics industry; Manufacturing industries; Particle measurements; Production facilities; Robustness; Semiconductor device manufacture; Throughput;
Conference_Titel :
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location :
Tokyo, Japan
DOI :
10.1109/ISSM.1994.729425
