DocumentCode :
2329417
Title :
How To Pursue Equipment Standardization
Author :
Akasaka, Y. ; Takata, S.
Author_Institution :
Technology Center, Applied Materials Japan
fYear :
1994
fDate :
21-22 June 1994
Firstpage :
117
Lastpage :
120
Abstract :
In proportion to required highly process technology, engineering modification with equipment has been heavily increased at relentless cost level. Due to equipment cost has increased substantially, semiconductor business has not been profitable anymore in Japan. Recovering to the healthy state again, every considerable efforts which will be reducing wastes should be performed by industry´s common perception. Equipment standardization would be one of key resolution for reducing, capital investment as global base. This is sure to crack the obstacle for semiconductor industry in near future.
Keywords :
Automobile manufacture; Costs; Electronics industry; Etching; Investments; Manufacturing industries; Productivity; Semiconductor materials; Standardization; Throughput;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location :
Tokyo, Japan
Type :
conf
DOI :
10.1109/ISSM.1994.729435
Filename :
729435
Link To Document :
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