Title :
How To Pursue Equipment Standardization
Author :
Akasaka, Y. ; Takata, S.
Author_Institution :
Technology Center, Applied Materials Japan
Abstract :
In proportion to required highly process technology, engineering modification with equipment has been heavily increased at relentless cost level. Due to equipment cost has increased substantially, semiconductor business has not been profitable anymore in Japan. Recovering to the healthy state again, every considerable efforts which will be reducing wastes should be performed by industry´s common perception. Equipment standardization would be one of key resolution for reducing, capital investment as global base. This is sure to crack the obstacle for semiconductor industry in near future.
Keywords :
Automobile manufacture; Costs; Electronics industry; Etching; Investments; Manufacturing industries; Productivity; Semiconductor materials; Standardization; Throughput;
Conference_Titel :
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location :
Tokyo, Japan
DOI :
10.1109/ISSM.1994.729435