• DocumentCode
    2329417
  • Title

    How To Pursue Equipment Standardization

  • Author

    Akasaka, Y. ; Takata, S.

  • Author_Institution
    Technology Center, Applied Materials Japan
  • fYear
    1994
  • fDate
    21-22 June 1994
  • Firstpage
    117
  • Lastpage
    120
  • Abstract
    In proportion to required highly process technology, engineering modification with equipment has been heavily increased at relentless cost level. Due to equipment cost has increased substantially, semiconductor business has not been profitable anymore in Japan. Recovering to the healthy state again, every considerable efforts which will be reducing wastes should be performed by industry´s common perception. Equipment standardization would be one of key resolution for reducing, capital investment as global base. This is sure to crack the obstacle for semiconductor industry in near future.
  • Keywords
    Automobile manufacture; Costs; Electronics industry; Etching; Investments; Manufacturing industries; Productivity; Semiconductor materials; Standardization; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
  • Conference_Location
    Tokyo, Japan
  • Type

    conf

  • DOI
    10.1109/ISSM.1994.729435
  • Filename
    729435