DocumentCode
2329417
Title
How To Pursue Equipment Standardization
Author
Akasaka, Y. ; Takata, S.
Author_Institution
Technology Center, Applied Materials Japan
fYear
1994
fDate
21-22 June 1994
Firstpage
117
Lastpage
120
Abstract
In proportion to required highly process technology, engineering modification with equipment has been heavily increased at relentless cost level. Due to equipment cost has increased substantially, semiconductor business has not been profitable anymore in Japan. Recovering to the healthy state again, every considerable efforts which will be reducing wastes should be performed by industry´s common perception. Equipment standardization would be one of key resolution for reducing, capital investment as global base. This is sure to crack the obstacle for semiconductor industry in near future.
Keywords
Automobile manufacture; Costs; Electronics industry; Etching; Investments; Manufacturing industries; Productivity; Semiconductor materials; Standardization; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location
Tokyo, Japan
Type
conf
DOI
10.1109/ISSM.1994.729435
Filename
729435
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