• DocumentCode
    2329555
  • Title

    A Constraint-Based Systems Approach To Line Yield Improvement

  • Author

    Menon, V.

  • Author_Institution
    Intel Corporation.
  • fYear
    1994
  • fDate
    21-22 June 1994
  • Firstpage
    155
  • Lastpage
    158
  • Abstract
    This paper adopts a "systems thinking" approach, in confluence with "theory of constraints", to develop line yield improvement tools for semiconductor fabrication. Systems Thinking emphasizes the underlying structure driving line yield behavior, thus uncovering high leverage strategies for line yield. A Constraints approach helps to focus improvement efforts on those line yield problems having the most revenue impact. Thus, after identifying fundamental issues that contribute to line yield performance, this paper recommends key changes to management systems, structure, and policies, to achieve higher line yields in semiconductor fabrication.
  • Keywords
    Constraint theory; Fabrication; Impedance; Lithography; Power system management; Production facilities; Resource management; Semiconductor device manufacture; Semiconductor device modeling; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
  • Conference_Location
    Tokyo, Japan
  • Type

    conf

  • DOI
    10.1109/ISSM.1994.729444
  • Filename
    729444