DocumentCode
2329555
Title
A Constraint-Based Systems Approach To Line Yield Improvement
Author
Menon, V.
Author_Institution
Intel Corporation.
fYear
1994
fDate
21-22 June 1994
Firstpage
155
Lastpage
158
Abstract
This paper adopts a "systems thinking" approach, in confluence with "theory of constraints", to develop line yield improvement tools for semiconductor fabrication. Systems Thinking emphasizes the underlying structure driving line yield behavior, thus uncovering high leverage strategies for line yield. A Constraints approach helps to focus improvement efforts on those line yield problems having the most revenue impact. Thus, after identifying fundamental issues that contribute to line yield performance, this paper recommends key changes to management systems, structure, and policies, to achieve higher line yields in semiconductor fabrication.
Keywords
Constraint theory; Fabrication; Impedance; Lithography; Power system management; Production facilities; Resource management; Semiconductor device manufacture; Semiconductor device modeling; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location
Tokyo, Japan
Type
conf
DOI
10.1109/ISSM.1994.729444
Filename
729444
Link To Document