DocumentCode :
2329555
Title :
A Constraint-Based Systems Approach To Line Yield Improvement
Author :
Menon, V.
Author_Institution :
Intel Corporation.
fYear :
1994
fDate :
21-22 June 1994
Firstpage :
155
Lastpage :
158
Abstract :
This paper adopts a "systems thinking" approach, in confluence with "theory of constraints", to develop line yield improvement tools for semiconductor fabrication. Systems Thinking emphasizes the underlying structure driving line yield behavior, thus uncovering high leverage strategies for line yield. A Constraints approach helps to focus improvement efforts on those line yield problems having the most revenue impact. Thus, after identifying fundamental issues that contribute to line yield performance, this paper recommends key changes to management systems, structure, and policies, to achieve higher line yields in semiconductor fabrication.
Keywords :
Constraint theory; Fabrication; Impedance; Lithography; Power system management; Production facilities; Resource management; Semiconductor device manufacture; Semiconductor device modeling; Throughput;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location :
Tokyo, Japan
Type :
conf
DOI :
10.1109/ISSM.1994.729444
Filename :
729444
Link To Document :
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