Abstract :
When we think about the cost and the throughput of the next generation semiconductor production quipment, first of all we should clarify the specification of the entire next generation semiconductor manufacturing line system, that is, manufacturing ability and amount of the investment. Next, we analyze this value and we obtain the cost and the throughput of the production equipments used in this line system. In this step, a needless function and excessive performance for the equipments are deleted. A proper target of the production equipment development can be clarified according to such procedures.
