• DocumentCode
    2329572
  • Title

    Cost And Throughput Of The Next Generation Semiconductor Production Equipments

  • Author

    Iwata, T.

  • Author_Institution
    Tokyo Electron Limited
  • fYear
    1994
  • fDate
    21-22 June 1994
  • Firstpage
    161
  • Lastpage
    164
  • Abstract
    When we think about the cost and the throughput of the next generation semiconductor production quipment, first of all we should clarify the specification of the entire next generation semiconductor manufacturing line system, that is, manufacturing ability and amount of the investment. Next, we analyze this value and we obtain the cost and the throughput of the production equipments used in this line system. In this step, a needless function and excessive performance for the equipments are deleted. A proper target of the production equipment development can be clarified according to such procedures.
  • Keywords
    Costs; Electronics industry; Investments; Large scale integration; Manufacturing industries; Marketing and sales; Production equipment; Production systems; Semiconductor device manufacture; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
  • Conference_Location
    Tokyo, Japan
  • Type

    conf

  • DOI
    10.1109/ISSM.1994.729445
  • Filename
    729445