DocumentCode
2329572
Title
Cost And Throughput Of The Next Generation Semiconductor Production Equipments
Author
Iwata, T.
Author_Institution
Tokyo Electron Limited
fYear
1994
fDate
21-22 June 1994
Firstpage
161
Lastpage
164
Abstract
When we think about the cost and the throughput of the next generation semiconductor production quipment, first of all we should clarify the specification of the entire next generation semiconductor manufacturing line system, that is, manufacturing ability and amount of the investment. Next, we analyze this value and we obtain the cost and the throughput of the production equipments used in this line system. In this step, a needless function and excessive performance for the equipments are deleted. A proper target of the production equipment development can be clarified according to such procedures.
Keywords
Costs; Electronics industry; Investments; Large scale integration; Manufacturing industries; Marketing and sales; Production equipment; Production systems; Semiconductor device manufacture; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location
Tokyo, Japan
Type
conf
DOI
10.1109/ISSM.1994.729445
Filename
729445
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