Title :
Ion Energies In A MPDR ECR Source Measured By Laser Induced Fluorescence
Author :
King, Grant W. ; Grotjohn, T. ; Asmussen, J.
Author_Institution :
Michigan State University
Keywords :
Energy measurement; Fluorescence; Gas lasers; Laser transitions; Masers; Measurement by laser beam; Plasma materials processing; Plasma measurements; Plasma sources; Pump lasers;
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
DOI :
10.1109/PLASMA.1991.695729