DocumentCode :
2329575
Title :
Ion Energies In A MPDR ECR Source Measured By Laser Induced Fluorescence
Author :
King, Grant W. ; Grotjohn, T. ; Asmussen, J.
Author_Institution :
Michigan State University
fYear :
1991
fDate :
3-5 June 1991
Firstpage :
190
Lastpage :
190
Keywords :
Energy measurement; Fluorescence; Gas lasers; Laser transitions; Masers; Measurement by laser beam; Plasma materials processing; Plasma measurements; Plasma sources; Pump lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
Type :
conf
DOI :
10.1109/PLASMA.1991.695729
Filename :
695729
Link To Document :
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