DocumentCode :
2329584
Title :
A Proposal For The Corrosive Gas Distribution System
Author :
Ozawa, E.
Author_Institution :
Air Liquide Laboratories
fYear :
1994
fDate :
21-22 June 1994
Firstpage :
165
Lastpage :
168
Abstract :
Each failure has a unique cause. Main causes of failures in corrosive gas line are human error in gas handing, bad function of pressure regulator due to corrosion and the corrosion of materials around welding sites. If these problems can be eliminated from the corrosive gas line, we will be able to realize much safer and higher-quality gas line. Establishment of good purging procedure, the usage of low Mn 316L, local usage of high corrosion resistant materials like Hastelloy etc. are the suitable and cost effective counterplan for corrosion problems.
Keywords :
Corrosion; Humans; Immune system; Moisture; Proposals; Regulators; Semiconductor materials; Surface resistance; Valves; Welding;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location :
Tokyo, Japan
Type :
conf
DOI :
10.1109/ISSM.1994.729446
Filename :
729446
Link To Document :
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