Abstract :
With recent semiconductor industries, as integration of circuit become much larger the investment to wafer fabrication become enormous. In the other word, the semiconductor industry is not so profitable industry as it was. In order to make profit in a most advanced LSI factory, we must increase the productivity to its highest point, at the most minimum facility investment. This paper describes the standardization of process conditions, the manufacturing equipments layout and the FAB operators employment as approaches to higher productivity.
