Title :
Minienvironment Technology And Automation Systems For Next Generation IC Fabs
Author :
Brain, M. ; Abuzeid, S.
Author_Institution :
Asyst Technologies, Inc.
Abstract :
The integration of Minienvironment and SMIF Systems into IC fabrication provides new automation requirements and design possibilities. A scenario for an optimized, integrated Minienvironment and SMIF-based Automated facility is described and the benefits are analyzed. Recent data is presented comparing particulate contamination within various conventional open and minienvironment-based facilities worldwide.
Keywords :
Automatic control; Control systems; Costs; Design automation; Manufacturing automation; Material storage; Particle measurements; Pollution measurement; Storage automation; Surface contamination;
Conference_Titel :
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location :
Tokyo, Japan
DOI :
10.1109/ISSM.1994.729448
