Title :
Anti-Corrosive And Anti-Catalytic Cr2O3 Treated Gas Tubing System
Author :
Shirai, Y. ; Miyoshi, S. ; Kojima, T. ; Ohmi, T.
Author_Institution :
Tohoku University
Abstract :
We have developed a complete chromium oxide (Cr2O3) passivation technology on the SUS316L stainless steel surfaces for use in high purity gas distribution systems and process chambers. Cr2O3 passivated surface has a great characteristic of anti-corrosion and reduces the amount of adsorbed moisture and is very excellent for the dry down property. This surface also has good chemical stability for very active specialty gases such as SiH4. Furthermore we have succeeded in forming a complete Cr2O3 passivated film on the electropolished (EP) surface of ferritic stainless steel.
Keywords :
Argon; Chromium; Corrosion; Human computer interaction; Moisture; Steel; Surface resistance; Surface texture; Surface treatment; Temperature;
Conference_Titel :
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location :
Tokyo, Japan
DOI :
10.1109/ISSM.1994.729461
