DocumentCode
2330956
Title
Prediction of the behavior of a microcantilever based optomechatronic force sensor by finite element method
Author
Ghanbari, Ahmad ; Rostami, Ali ; Fakhrabadi, Mir Masoud Seyyed ; Janabi-Sharifi, Farrokh
Author_Institution
Center of Excellence for Mechatron., Univ. of Tabriz, Tabriz, Iran
fYear
2009
fDate
21-23 Sept. 2009
Firstpage
334
Lastpage
339
Abstract
The main goal of this study is the presentation and development of a novel optomechatronic force sensor based on optical coupling between two waveguides. Static and partially dynamic behavior of proposed system will be studied here.
Keywords
finite element analysis; force sensors; micromechanical devices; optical couplers; finite element method; microcantilever; optical coupling; optomechatronic force sensor; Atomic force microscopy; Chemical sensors; Electromagnetic waveguides; Finite element methods; Force sensors; Magnetic analysis; Mechanical sensors; Optical coupling; Optical waveguides; Tellurium; nano mechanical cantilever; optomechatronic; sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Optomechatronic Technologies, 2009. ISOT 2009. International Symposium on
Conference_Location
Istanbul
Print_ISBN
978-1-4244-4209-6
Electronic_ISBN
978-1-4244-4210-2
Type
conf
DOI
10.1109/ISOT.2009.5326044
Filename
5326044
Link To Document