Title :
Prediction of the behavior of a microcantilever based optomechatronic force sensor by finite element method
Author :
Ghanbari, Ahmad ; Rostami, Ali ; Fakhrabadi, Mir Masoud Seyyed ; Janabi-Sharifi, Farrokh
Author_Institution :
Center of Excellence for Mechatron., Univ. of Tabriz, Tabriz, Iran
Abstract :
The main goal of this study is the presentation and development of a novel optomechatronic force sensor based on optical coupling between two waveguides. Static and partially dynamic behavior of proposed system will be studied here.
Keywords :
finite element analysis; force sensors; micromechanical devices; optical couplers; finite element method; microcantilever; optical coupling; optomechatronic force sensor; Atomic force microscopy; Chemical sensors; Electromagnetic waveguides; Finite element methods; Force sensors; Magnetic analysis; Mechanical sensors; Optical coupling; Optical waveguides; Tellurium; nano mechanical cantilever; optomechatronic; sensor;
Conference_Titel :
Optomechatronic Technologies, 2009. ISOT 2009. International Symposium on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4244-4209-6
Electronic_ISBN :
978-1-4244-4210-2
DOI :
10.1109/ISOT.2009.5326044
