Application of AZARASHI (seal) positioning mechanism to micromanipulation by vacuum suction

This paper deals with an application of a small mobile device, ldquoAZARASHI (seal) Mechanismrdquo with three degrees of freedom (DOFs) to a micromanipulation device. AZARASHI mechanism has a smaller number of controlled devices than the inchworm-like device. The small device with multiple DOFs can be built by combining such mechanism. A micromanipulation device consists of an L-shaped device for the x-, y- and thetas-motions, and one-DOF device in the z-motion. By the visual feedback, a glass bead is placed automatically. In order to trap a glass bead with a diameter of 60-70 mum, the air was gently sucked through the glass capillary. Then the bead is trapped and placed after moving the stage. Finally, the bead is placed. The performance of the manipulation device was measured. Positioning accuracy of the stage was within 1 pixel. However, a process of the bead release often disturbed the total accuracy.