DocumentCode :
2332488
Title :
Operational Performance Of A Compact Coaxial ECR Plasma Source For MBE Applications
Author :
Srivastava, A.F. ; Dahimens, M. ; Grotjohn, T. ; Asmussen, J.
Author_Institution :
Michigan State University
fYear :
1991
fDate :
3-5 June 1991
Firstpage :
196
Lastpage :
196
Keywords :
Coaxial components; Electrodes; Electromagnetic heating; Molecular beam epitaxial growth; Plasma applications; Plasma measurements; Plasma sources; Plasma temperature; Resonance; Superconducting magnets;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
Type :
conf
DOI :
10.1109/PLASMA.1991.695744
Filename :
695744
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2332488
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