DocumentCode
2332563
Title
Aqueous synthesis of silicon nanowire arrays and core-shell structures via electroless nanoelectrochemical process
Author
Ng, L.K. ; Kok, K.Y. ; Abidin, S. S Zainal ; Saidin, N.U. ; Choo, T.F.
Author_Institution
Malaysian Nucl. Agency, Kajang, Malaysia
fYear
2010
fDate
1-3 Dec. 2010
Firstpage
1
Lastpage
2
Abstract
In the present study, we have demonstrated the synthesis of large-area vertically aligned silicon nanowire (SiNW) arrays in an aqueous solution containing AgNCh and HF on p-type (001) Si substrate by self-selective electroless etching process. The fabrication process was rather simple and rapid compared to the well-known Vapor-Liquid-Solid (VLS) growth via chemical-vapor deposition (CVD) and other highvacuum techniques. In this work, the temperature of electrolyte and etching duration were varied in order to achieve different stages of nanowire formation. Diameters of the SiNWs obtained varied from 50 nm to 200 nm and their lengths ranged from several to approximately a few tens of μm, depending on the reaction time and the electrolyte conditions used. Te-Si and Bi2Te3-Si core-shell structures were subsequently obtained via galvanic displacement of SiNWs in acidic HF electrolytes containing Bi 3+ and Bi3+/HTeO2+ ions respectively.
Keywords
bismuth compounds; electrochemical analysis; electrolytes; elemental semiconductors; etching; nanofabrication; nanowires; semiconductor growth; silicon; surface roughness; tellurium; Bi2Te3-Si; Si; Te-Si; acidic electrolytes; aqueous synthesis; core-shell structures; electroless nanoelectrochemical process; electrolyte temperature; galvanic displacement; large-area vertically aligned silicon nanowire arrays; p-type (001) Si substrate; self-selective electroless etching; size 50 nm to 200 nm;
fLanguage
English
Publisher
ieee
Conference_Titel
Enabling Science and Nanotechnology (ESciNano), 2010 International Conference on
Conference_Location
Kuala Lumpur
Print_ISBN
978-1-4244-8853-7
Type
conf
DOI
10.1109/ESCINANO.2010.5700989
Filename
5700989
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