• DocumentCode
    2333061
  • Title

    Effects of spin coating speed on nanostructured Titanium Dioxide thin films properties

  • Author

    Zahidi, Musa Mohamed ; Malek, Mohd Firdaus ; Mamat, Mohamad Hafiz ; Rashied, Norulhuda Abd ; Noor, Uzer Mohd ; Bin Mahmood, Mohamad Rusop

  • Author_Institution
    Univ. Technol. MARA, Shah Alam, Malaysia
  • fYear
    2010
  • fDate
    1-3 Dec. 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    This work aims to understand the effects of spin coating speed to the structural and optical properties of TiO2 thin films for dynamic dispense method. Film thickness is measured at three different points and the average is taken. At the lowest spin speed (2000 rpm), the resulting thin films average thickness is 187.8 nm. With the increment of spin speed, the film´s thickness decrease almost linearly which agrees with the result reported by Dewi et al [1]. As the spin speed increases, the centrifugal force will cause more TiO2 particle to be thrown away from the substrate thus leaving only thinner film. The higher spin speed cause smaller TiO2 particle to be removed from the substrate, leaving only larger particle which causes higher surface roughness, that eventually leads to lower optical transmittance.
  • Keywords
    nanofabrication; nanoparticles; semiconductor growth; semiconductor thin films; spin coating; surface roughness; titanium compounds; ultraviolet spectra; visible spectra; wide band gap semiconductors; TiO2; UV-vis spectroscopy; centrifugal force; dynamic dispense method; nanostructured titanium dioxide thin films properties; optical properties; optical transmittance; spin coating speed effects; surface roughness; titanium dioxide particle;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Enabling Science and Nanotechnology (ESciNano), 2010 International Conference on
  • Conference_Location
    Kuala Lumpur
  • Print_ISBN
    978-1-4244-8853-7
  • Type

    conf

  • DOI
    10.1109/ESCINANO.2010.5701016
  • Filename
    5701016