DocumentCode :
2333224
Title :
An Improved Spiral Loop Antenna For Inductively Coupled Plasma Sources
Author :
Intrator, T. ; Menard, J.
Author_Institution :
University of Wisconsin
fYear :
1991
fDate :
3-5 June 1991
Firstpage :
197
Lastpage :
197
Keywords :
Cathodes; Magnetic confinement; Magnetic field measurement; Magnetic fields; Plasma applications; Plasma confinement; Plasma density; Plasma materials processing; Plasma sources; Spirals;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
Type :
conf
DOI :
10.1109/PLASMA.1991.695748
Filename :
695748
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2333224
بازگشت