• DocumentCode
    2333224
  • Title

    An Improved Spiral Loop Antenna For Inductively Coupled Plasma Sources

  • Author

    Intrator, T. ; Menard, J.

  • Author_Institution
    University of Wisconsin
  • fYear
    1991
  • fDate
    3-5 June 1991
  • Firstpage
    197
  • Lastpage
    197
  • Keywords
    Cathodes; Magnetic confinement; Magnetic field measurement; Magnetic fields; Plasma applications; Plasma confinement; Plasma density; Plasma materials processing; Plasma sources; Spirals;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
  • Conference_Location
    Williamsburg, VA, USA
  • Print_ISBN
    0-7803-0147-1
  • Type

    conf

  • DOI
    10.1109/PLASMA.1991.695748
  • Filename
    695748
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2333224