Title :
Nanostructure evolution of titanium dioxide layers from titanium thin films using hydrothermal treatment
Author :
Yang, Jung-Yen ; Cheng, Hui-Wen ; Li, Yiming
Author_Institution :
Nat. Nano Device Labs., Hsinchu, Taiwan
Abstract :
In this study, a hydrothermal route is advanced for the formation of titanium dioxide nanostructures. The wetting properties and structure evolution of the hydrothermally grown TiO2 nanostructures are studied. Sputtered titanium thin films have been treated under hydrothermal conditions. The results show that the morphologies, microstructures and surface properties of the TiO2 nanostructured films vary with increasing hydrothermal treatment times. Prolonged hydrothermal treatment leads to the formation of TiO2 nanorods.
Keywords :
nanofabrication; nanorods; semiconductor growth; semiconductor materials; sputter deposition; surface morphology; titanium compounds; wetting; TiO2; hydrothermal treatment; microstructures; morphologies; nanostructure evolution; surface properties; titanium dioxide layers; titanium thin films; wetting properties;
Conference_Titel :
Enabling Science and Nanotechnology (ESciNano), 2010 International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4244-8853-7
DOI :
10.1109/ESCINANO.2010.5701050