DocumentCode
2334193
Title
IWSM. 1998 3rd International Workshop on Statistical Metrology (Cat. No.98EX113)
fYear
1998
fDate
7-7 June 1998
Abstract
The following topics were dealt with: statistical TCAD; defect metrology; yield; design with variability; and variability modelling
Keywords
design for manufacture; integrated circuit measurement; integrated circuit yield; technology CAD (electronics); defect metrology; design with variability; statistical TCAD; variability modelling; yield;
fLanguage
English
Publisher
ieee
Conference_Titel
Statistical Metrology, 1998. 3rd International Workshop on
Conference_Location
Honolulu, HI, USA
Print_ISBN
0-7803-4338-7
Type
conf
DOI
10.1109/IWSTM.1998.729751
Filename
729751
Link To Document