Application of dielectric elastomer planar actuators in a micropump chip

This paper presented a valveless micropump driven and sealed by dielectric elastomers (DEs). First, the planar DE actuator was designed and the diaphragm actuating performances were characterized. Then the micropump, containing a chamber and a pair of nozzle/diffuser, was fabricated on SU-8 under exposure to UV-light with a mask. The diaphragm and the SU-8 was sealed by adhesive tape and finally covered by a PMMA. The pumping and flow rate was tested and measure under high AC supply. Due to the undesirable durability, most micropumps were breakdown, and a maxim flow rate of 0.078ml/min was achieved under 4000 V, 0.5 Hz sine wave. The micropump is attractive but needs further investigation before any successful application.