Title :
Mechatronics of electrostatic microactuators and micro-gyroscopes
Author :
Horowitz, Roberto ; Li, Yunfeng ; Park, Sungsu
Author_Institution :
Dept. of Mech. Eng., California Univ., Berkeley, CA, USA
Abstract :
This paper discusses two applications of microelectromechanical systems (MEMS). The first involves the design, fabrication and control of electrostatic microactuators for dual-stage servo systems in magnetic disk drives. The second involves the design and control of electrostatic oscillatory Z-axis microgyroscopes for measuring out-of-plane angular rotation.
Keywords :
angular measurement; disc drives; electrostatic actuators; gyroscopes; magnetic disc storage; mechatronics; servomechanisms; MEMS; dual-stage servo systems; electrostatic microactuators; electrostatic oscillatory Z-axis microgyroscopes; magnetic disk drives; mechatronics; microelectromechanical systems; out-of-plane angular rotation measurement;
Conference_Titel :
Advanced Motion Control, 2000. Proceedings. 6th International Workshop on
Conference_Location :
Nagoya, Japan
Print_ISBN :
0-7803-5976-3
DOI :
10.1109/AMC.2000.862813
