DocumentCode
2334943
Title
Mechatronics of electrostatic microactuators and micro-gyroscopes
Author
Horowitz, Roberto ; Li, Yunfeng ; Park, Sungsu
Author_Institution
Dept. of Mech. Eng., California Univ., Berkeley, CA, USA
fYear
2000
fDate
1-1 April 2000
Abstract
This paper discusses two applications of microelectromechanical systems (MEMS). The first involves the design, fabrication and control of electrostatic microactuators for dual-stage servo systems in magnetic disk drives. The second involves the design and control of electrostatic oscillatory Z-axis microgyroscopes for measuring out-of-plane angular rotation.
Keywords
angular measurement; disc drives; electrostatic actuators; gyroscopes; magnetic disc storage; mechatronics; servomechanisms; MEMS; dual-stage servo systems; electrostatic microactuators; electrostatic oscillatory Z-axis microgyroscopes; magnetic disk drives; mechatronics; microelectromechanical systems; out-of-plane angular rotation measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Motion Control, 2000. Proceedings. 6th International Workshop on
Conference_Location
Nagoya, Japan
Print_ISBN
0-7803-5976-3
Type
conf
DOI
10.1109/AMC.2000.862813
Filename
862813
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