• DocumentCode
    2336010
  • Title

    Neutral accumulation from plasma-wall interactions in plasma opening switches

  • Author

    Chen, L.L. ; Geary

  • Author_Institution
    Berkeley Res. Associates, Springfield, VA, USA
  • fYear
    1989
  • fDate
    0-0 1989
  • Firstpage
    123
  • Abstract
    Summary Form only given, as follows. The effects of contaminants on the electrodes of plasma opening switches have been studied. The contaminants introduce backscattered and sputtered neutral atoms into the carbon plasma that is impinging on the cathode. The process has been investigated with the TRIM.SP code. The distribution of density of these neutral atoms from the cathode surface has been obtained and found to be substantial compared to the density of the incident carbon plasma. The dependence of the sputtering yield on the composition of the contaminants has also been studied.<>
  • Keywords
    cathodes; plasma switches; plasma-wall interactions; TRIM.SP code; backscattering; cathode surface; contaminants; plasma opening switches; plasma-wall interactions; sputtered neutral atoms; sputtering yield; Cathodes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1989. IEEE Conference Record - Abstracts., 1989 IEEE International Conference on
  • Conference_Location
    Buffalo, NY, USA
  • Type

    conf

  • DOI
    10.1109/PLASMA.1989.166188
  • Filename
    166188