Title :
3D profile measurement using a cylindrical lens and a CCD
Author :
Shoji, Tetsufumi ; Nishida, Yasuhide
Author_Institution :
NTT Interdisciplinary Res. Labs., Musashino, Japan
Abstract :
A novel surface profile measuring method which is useful in micro-mechatronics is reported. The instrument for this method has simple construction and consists of a cylindrical lens, a CCD placed at an angle to the optical axis of the cylindrical lens, an objective lens, and a light source. This method can measure surface height without scanning to optical axis. Calculation and experiments show that this method is capable of measuring with an accuracy of ±5 μm and dynamic range of 150 μm
Keywords :
CCD image sensors; lenses; mechatronics; shape measurement; surface topography measurement; 3D profile measurement; CCD; cylindrical lens; light source; micro-mechatronics; objective lens; surface height; surface profile measuring method; Charge coupled devices; Dynamic range; Instruments; Laboratories; Laser beams; Lenses; Light sources; Microstructure; Optical sensors; Structural beams;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1994. IMTC/94. Conference Proceedings. 10th Anniversary. Advanced Technologies in I & M., 1994 IEEE
Conference_Location :
Hamamatsu
Print_ISBN :
0-7803-1880-3
DOI :
10.1109/IMTC.1994.351809
