Title :
Silicon Micromachined Vacuum Encapsulated Resonant Pressure Sensors
Author_Institution :
Yokogawa Electric Corporation
Keywords :
Bridges; Capacitive sensors; Gas detectors; Interference; Isolation technology; Q factor; Resonance; Resonant frequency; Sensor phenomena and characterization; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729960
