DocumentCode
2337023
Title
Silicon Micromachined Vacuum Encapsulated Resonant Pressure Sensors
Author
Ikeda, Ken-ichi
Author_Institution
Yokogawa Electric Corporation
fYear
1998
fDate
13-16 July 1998
Firstpage
56
Lastpage
57
Keywords
Bridges; Capacitive sensors; Gas detectors; Interference; Isolation technology; Q factor; Resonance; Resonant frequency; Sensor phenomena and characterization; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.729960
Filename
729960
Link To Document