Title :
Calibration of deep level measurement systems in semiconductors
Author :
Sandoval, Francisco ; Cancelo, Juan C. ; Garcia-Pérez, F.
Author_Institution :
Dpto. Tecnol. Electron., Malaga Univ., Spain
Abstract :
The design of a waveform generator for testing deep level transient spectroscopy (DLTS) measurement systems is described. It is a personal computer-based arbitrary waveform synthesizer, capable of generating functions with temporal variations from a period to the next one, i.e., to generate non repetitive signal in time, as it actually happens with the capacitance transients in the DLTS system when the temperature varies
Keywords :
calibration; computerised instrumentation; deep level transient spectroscopy; function generators; microcomputer applications; arbitrary waveform synthesizer; calibration; capacitance transients; deep level measurement; deep level transient spectroscopy; nonrepetitive signal; personal computer; semiconductors; software configuration; temporal variations; waveform generator; Calibration; Capacitance; Electron traps; Level measurement; Microcomputers; Signal generators; Spectroscopy; Synthesizers; Telecommunications; Temperature;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1994. IMTC/94. Conference Proceedings. 10th Anniversary. Advanced Technologies in I & M., 1994 IEEE
Conference_Location :
Hamamatsu
Print_ISBN :
0-7803-1880-3
DOI :
10.1109/IMTC.1994.351905
